Ultech
Ultech manufactures a wide range of equipment for the MEMS and Nanotechnology research institutes.
Their products include:
  • Dry Etching System
  • CVD System
  • LPCVD/Furnace System
  • Sputtering System
  • UTR Series (RTP)
  • CABOT Series (wafer transfer)
  • UTS Series (spin coater)
  • Heater
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